Hey everybody,

I've been scrounging the 'net for industry, military, automotive or otherwise governing or guidance standard(s) and/or specs for cleanroom, and found nothing definite so far.

What I'm looking for is something that states materials restrictions, as in particle size, sodium and potassium. I'd also really like access to things like a list of accepted abrasive materials, packaging for tools and consumables, stuff like that.

Can anybody help point me in the right direction?

Hey Jennifer,

Did you find the ones in the attachment already?

I hope it helps,

Best regards,

Antoine

Jennifer,
I found this information at SEMICON.org

Does SEMI have standards for cleanrooms?
Other than SEMI F21, Classification Of Airborne Molecular Contaminant Levels In Clean Environments, SEMI does not possess any specifications for cleanrooms.

The two most often specifications cited in SEMI Standards for cleanroom cleanliness are:

ISO 14644 - Cleanrooms and Associated Controlled Environments Part 1: Classification of Air Cleanliness
Federal Standard 209E - Clean Room and Work Station Requirements, Controlled Environments

For further information regarding cleanrooms and applicable standards, we recommend contacting one or more of the following:

ISO (International Standards Organization) at http://www.iso.ch
IEC (International Electrotechnical Commission) at http://www.iec.ch
IES (Institute of Environmental Sciences) at http://www.instenvsci.org

Phil

Hello Jennifer
I don't know all the contents of this site, but I found it useful at a time.
See if you can find some more info there.
http://www.siliconfareast.com/
If I will have some more time, will try to locate something more for you.
Also see this attacment :
http://elsmar.com/Forums/attachment.php?
BR
György