Re: Profilometer Calibration
This will probably age me, but back in the 80's I calibrated some Dektak Surface Profilometers. It was done with a certified Step Height Standard. Basically is is a certified "ridge" on a flat surface, with a known height. These were in the microns (in terms of their size). I am not familiar with the profilometer you mentioned, but my input would be that you are correct. You have to have some sort of traceable standard to know your profilometer is accurate.
You could do a web search for Dektak, Step Height Standards, or "VLSI Standards". The third one (VLSI Standards) is a company in California that makes very good standards (at least they used to). I actually have some of these standards in my garage I grabbed during a factory closure a number of years ago (although I am not trying to sell them here), just a general comment to illustrate my familiarity.