Anyone with experience of what the auditors are looking for here? It needs to be "documented information". We have equipment manuals that specify precision voltage sources as an example, but other than that we get equipment capable of taking the measurements like torque equipment.
You could create a record of evaluation for each measurement specified for receiving, in-process, and final inspection, etc. but that would become an overwhelming task rather quickly.
I would say that you could handle this in a much more general way. For example, a machine shop may measure a lot of similar types of features with general measuring equipment, such as steel rulers, calipers, and micrometers. Each piece of equipment has different capabilities and would not be suitable for the measurement of all features. You could create a document based on accepted principles or studies that states a ruler can be used to measure features with tolerances of ±X of above. 6" calipers (with a display resolution of .0005") can be used to measure features with tolerances of ±Y or above. 8" calipers (with a display resolution of .001") can be used to measure features with tolerances of ±YY or above. Micrometers can be used to measure features with tolerances of ±Z or above.
This would get a lot of the general measurements out of the way in one document. For more specialized features and equipment you may need individual records of the decisions made, and may need to do R&R studies to demonstrate suitability.