Gauge (Gage) R&R for interferometer test used to measure scanners Z range in microns

R

Rios oxnard qe

#1
Anyone have any suggestions how I can go about performing a Gauge R&R on a interferometer measurement system used to measure scanners Z range in microns. I am getting a lot of variation in the values and it doesn't stabilize. I quickly record the first value that comes up before the values go crazy. This test consist of a controller, a lazer, PC, software, and a fixture. I am told the unit does not stabalize because of thermal drift. I hope you can help. Thank you.
 
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Jim Wynne

Staff member
Admin
#2
Re: Gauge R&R for interferometer test

Rios oxnard qe said:
Anyone have any suggestions how I can go about performing a Gauge R&R on a interferometer measurement system used to measure scanners Z range in microns. I am getting a lot of variation in the values and it doesn't stabilize. I quickly record the first value that comes up before the values go crazy. This test consist of a controller, a lazer, PC, software, and a fixture. I am told the unit does not stabalize because of thermal drift. I hope you can help. Thank you.
If the thing won't stabilize, a GR&R won't help. If thermal drift is the issue, and the thing doesn't perform as intended, you need to address that issue first.
 

Miner

Forum Moderator
Staff member
Admin
#3
Re: Gauge R&R for interferometer test used to measure scanners Z range in microns

Perform a stability study on it first. As Jim said, if it fails stability, you need to address that before worrying about R&R.

If you have not performed a stability study before, it is essentially repeated measurements of the same sample over a longer period of time then plotted on a control chart and evaluated for trends/out-of-control.
 

Hershal

Metrologist-Auditor
Staff member
Super Moderator
#4
Re: Gauge R&R for interferometer test used to measure scanners Z range in microns

First question.....what interferometer are you using? It sounds like a HP, which requires a "weather station" (their term) to adequately compensate for that. If so, then you need either the weather station or a room that you can control within say a maximum of 1 degree C when the laser is on to minimize the drift. It will still be there but should not be as bad.

Also, when was the last time it was calibrated and by who? That can easily affect the drift.

Is the scanner in motion when you are taking readings?

Hershal
 
R

Rios oxnard qe

#5
Re: Gauge R&R for interferometer test used to measure scanners Z range in microns

Thanks for your reponse. I am using a Zygo interferometer. I am told the thermal drift is from the Lazer heating up the ceramic tube and not related to the actual room environment.
 

Hershal

Metrologist-Auditor
Staff member
Super Moderator
#6
Re: Gauge R&R for interferometer test used to measure scanners Z range in microns

That explanation seems plausible, given that you use a Zygo.....they are very stable generally.

Do you also have the Zygo calibration/characterization lenses? They can get fairly thick and are generally encased in a heavy black frame.

Hershal
 
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