A
Hi all. I'm conducting two MSA's on two tools in our factory (wafer fab) and I have already collected the data, but I'm stumped on the JMP analysis portion. I've come across various ways of calculating the data, but I don't know which is correct in my situation.
Since the tools are fully automated (robot loader), I've excluded the operator variance. Since the wafers were produced on different tools, they will be analyzed individually.
Tool A:
6 wafers
5 days
5 loads per day
5 sites on the wafer - Site difference is due to process variation.
no repeats per site since the tool is not capable of running a recipe like that.
Tool B
3 wafers
3 days
5 loads per day
5 sites - Site difference is due to process variation.
5 repeats per site
I'm confused as to whether the data is crossed, nested or both and which variance components need to be used in my calculation to calculate R&R (sqrt of sum of variances). Since I'm ultimately calculating P/T, I've been multiplying R&R by 6 and dividing by the USL-LSL.
In JMP, I'm using the Variability/ Gauge chart in the graph menu. Can someone please show me how to analyze this?
Thanks!
Since the tools are fully automated (robot loader), I've excluded the operator variance. Since the wafers were produced on different tools, they will be analyzed individually.
Tool A:
6 wafers
5 days
5 loads per day
5 sites on the wafer - Site difference is due to process variation.
no repeats per site since the tool is not capable of running a recipe like that.
Tool B
3 wafers
3 days
5 loads per day
5 sites - Site difference is due to process variation.
5 repeats per site
I'm confused as to whether the data is crossed, nested or both and which variance components need to be used in my calculation to calculate R&R (sqrt of sum of variances). Since I'm ultimately calculating P/T, I've been multiplying R&R by 6 and dividing by the USL-LSL.
In JMP, I'm using the Variability/ Gauge chart in the graph menu. Can someone please show me how to analyze this?
Thanks!