Help with JMP Variance Components for P/T Calculation

A

anon123

#1
Hi all. I'm conducting two MSA's on two tools in our factory (wafer fab) and I have already collected the data, but I'm stumped on the JMP analysis portion. I've come across various ways of calculating the data, but I don't know which is correct in my situation.

Since the tools are fully automated (robot loader), I've excluded the operator variance. Since the wafers were produced on different tools, they will be analyzed individually.

Tool A:
6 wafers
5 days
5 loads per day

5 sites on the wafer - Site difference is due to process variation.

no repeats per site since the tool is not capable of running a recipe like that.

Tool B
3 wafers
3 days
5 loads per day
5 sites - Site difference is due to process variation.
5 repeats per site

I'm confused as to whether the data is crossed, nested or both and which variance components need to be used in my calculation to calculate R&R (sqrt of sum of variances). Since I'm ultimately calculating P/T, I've been multiplying R&R by 6 and dividing by the USL-LSL.

In JMP, I'm using the Variability/ Gauge chart in the graph menu. Can someone please show me how to analyze this?

Thanks!
 
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T

Tom Slack

#2
Everyone, please write out the model before collecting data (can't find a begging icon).

I can help with the model part of the question. Draw a series of big boxes. The big box is "day". In deciding if the factor is nested or crossed, see if randomization is possible. We know the big box is "day" because we haven't invented time travel. Unfortunately we can't travel back in time take a day 5 waffer and put it in day 2.

I am not sure what a "load" is, but if it contains "waffers", it probably is the next big box. If the waffers are transformed such that can't be untransformed, then they would be the smallest box inside the other boxes. In this case, the model would be fully nested.

After running the model, first look at the degrees of freedom to see if it makes sense. If it doesn't take another look at the model.

Tom
 

reynald

Quite Involved in Discussions
#3
anon,
it might help us help you if you define some terms as
5 loads per day
5 repeats per site

By what i understand in a wafer process, GR&R studies for fab can seldom be crossed. (You can not take the same wafer and conduct a similar deposition/sputtering process again).

Anyways JMP has a built-in P/T analysis. I attached a screenshot for you. Just make sure you have a right model though.


Hope that helps.
 

Attachments

A

anon123

#4
For my case, the tools I am doing the GR&R are metrology tools which measure film thickness and resistance. A load consists of the robot loading the wafer and taking a measurement. This is done 5 times. The sites are 5 different measurement locations on the wafer. Each site is measured 5 times. The tool is non-destructive. The model is what I am having trouble coming up with.
 
A

anon123

#5
Anyways JMP has a built-in P/T analysis. I attached a screenshot for you. Just make sure you have a right model though.
I was told that using the built in P/T wasn't correct in that you can't choose which variance components are included in the calculation.
 
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