An attribute study would be best.
Acceptance criteria is dependent on who is asking for the study to be performed. If it's a customer then they would specifiy the criteria.
If this is an internal requirement then the criteria should be based on the number fo false accepts and false rejects that you are willing to have. This is typically based on the resulting cost.
For others reading this thread the OP is discussing a semiconductor handler with a vision system for inspecting attributes of the devices. The handlers can be used for packaging and for feeding electronic testers.